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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Springer Series in Advanced Manufacturing 2010 edition
Wei Gao
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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Springer Series in Advanced Manufacturing 2010 edition
Wei Gao
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items.
367 pages, 3 black & white tables, biography
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 28 de junho de 2010 |
| ISBN13 | 9781849962537 |
| Editoras | Springer London Ltd |
| Páginas | 354 |
| Dimensões | 241 × 165 × 28 mm · 635 g |
| Idioma | English |
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