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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS 2º edição
Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan)
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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS 2º edição
Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan)
Faetures a team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. This book introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
658 pages, black & white illustrations
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 20 de novembro de 2012 |
| ISBN13 | 9781437734836 |
| Editoras | William Andrew Publishing |
| Páginas | 660 |
| Dimensões | 239 × 163 × 40 mm · 1,04 kg |