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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems 2002 edition
Gerhard Lammel
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems 2002 edition
Gerhard Lammel
Shows how to design and fabricate optical microsystems using technologies and original architectures. This work explains a barcode scanner, laser projection mirror and a microspectrometer, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, and device test to the system assembly.
268 pages, biography
Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
Lançado | 31 de janeiro de 2002 |
ISBN13 | 9780792376552 |
Editoras | Springer |
Páginas | 268 |
Dimensões | 156 × 234 × 17 mm · 576 g |
Idioma | English |
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