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![Cover for Jianfeng Luo · Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales (Paperback Book) [Softcover reprint of hardcover 1st ed. 2004 edition] (2010)](https://imusic.b-cdn.net/images/item/original/158/9783642061158.jpg?jianfeng-luo-2010-integrated-modeling-of-chemical-mechanical-planarization-for-sub-micron-ic-fabrication-from-particle-scale-to-feature-die-and-wafer-scales-paperback-book&class=scaled&v=1606418065)
![Cover for Jianfeng Luo · Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales (Hardcover Book) [2004 edition] (2004)](https://imusic.b-cdn.net/images/item/original/696/9783540223696.jpg?jianfeng-luo-2004-integrated-modeling-of-chemical-mechanical-planarization-for-sub-micron-ic-fabrication-from-particle-scale-to-feature-die-and-wafer-scales-hardcover-book&class=scaled&v=1606418086)