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![Cover for Christopher Lyle Borst · Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology (Hardcover Book) [2002 edition] (2002)](https://imusic.b-cdn.net/images/item/original/935/9781402071935.jpg?christopher-lyle-borst-2002-chemical-mechanical-polishing-of-low-dielectric-constant-polymers-and-organosilicate-glasses-fundamental-mechanisms-and-application-to-ic-interconnect-technology-hardcover-book&class=scaled&v=1526580973)