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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques.
134 pages
Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
Lançado | 2 de maio de 2018 |
ISBN13 | 9781789230307 |
Editoras | IntechOpen |
Páginas | 134 |
Dimensões | 251 × 176 × 17 mm · 406 g |
Idioma | English |
Editor | Thirumalai, Jagannathan |
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