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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition
S a Campbell
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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition
S a Campbell
A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.
406 pages, 141 illustrations, 34 graphs, 18 tables
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 8 de maio de 1998 |
| ISBN13 | 9780471966821 |
| Editoras | John Wiley & Sons Inc |
| Páginas | 408 |
| Dimensões | 163 × 237 × 29 mm · 775 g |
| Idioma | English |
| Editor | Campbell, S. A. |
| Editor | Lewerenz, H. J. |
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